![Stacks Image 534](KLA Tencor_files/stacks-image-cea8464.jpg)
The P-7 Stylus profiler is capable of addressing a wide range of surface measurements and applications:
• Film step height measurements
• Photo resist thickness
• Etched trench depth
• Materials characterization for surface roughness and waviness
• 3D imaging of various surfaces
Sample size up to 150mm. Up to 150mm scan length with 1mm Z-range.
• Film step height measurements
• Photo resist thickness
• Etched trench depth
• Materials characterization for surface roughness and waviness
• 3D imaging of various surfaces
Sample size up to 150mm. Up to 150mm scan length with 1mm Z-range.
![Stacks Image 587](KLA Tencor_files/stacks-image-df093e7.jpg)
3D Profilometry scan of a Nickel.
![Stacks Image 589](KLA Tencor_files/stacks-image-4e7ec64-400x320.jpg)
![Stacks Image 597](KLA Tencor_files/stacks-image-01d5e8e-400x116.jpg)
Step height measurement